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Page 89
Figure 2.20
Yield vs. wafer defects for Poisson distributed defects. The
improved estimate is based on the work of Murphy [210]. See
also Walker [299].
The total number of die realized by the 21-cm wafer is
For 2.3 cm
2
die,
N
= 130
(d
= 21,
A
= 2.3),
and for 1.0 cm
2
die,
N
= 314
(d
= 21,
A
= 1).
The yield is (
r
D
= 1 defect/cm
2
).
For 2.3 cm
2
:
Y
= 0.1
(A
= 2.3,
r
D
= 1).
For 1.0 cm
2
:
Y
= 0.37
(A
= 1,
r
D
= 1).
So, since
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